Abatement Systems and Surface Treatment
Abatement systems refer to exhaust gas treatment equipment that safely treat and discharge toxic gases generated in factories, research, and other facilities.Resonac offers abatement systems for removing greenhouse gases (GHG) with high global warming potential (GWP), such as acidic exhaust gases and perfluorocarbons (PFCs) produced in semiconductor etching processes.
Resonac also provides metal surface treatment to generate various types of properties by depositing nickel (Ni) alloy coatings in multilayers.
Product List of Abatement Systems and Surface Treatment
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Resonac’s treatment uses the electroless plating method to deposit multilayer nickel (Ni) alloy film coatings on the metal surface of semiconductor manufacturing equipment. This surface treatment generates various properties that include corrosion resistance to corrosive gas atmospheres, wear resistance to sliding mechanical components, high mold releasability for rubber and other molds, and reduced mold contamination.
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Resonac’s exhaust gas treatment equipment can discharge greenhouse gas perfluorocarbons (PFCs) generated in semiconductor wafer manufacturing processes as clean gases. Resonac offers a dry system that adopts a chemical reaction method with no water treatment required as well as a catalytic system for efficiently decomposing PFCs with high-level safety.
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Resonac’s exhaust gas treatment equipment “Clean-S Z Series” can discharge toxic acid gases produced in the dry etching process of aluminium (Al), polycrystalline silicon (poly-Si), and silicon dioxide (SiO2) films in semiconductor manufacturing as safe and clean gases. In 1985, Resonac was the first company to develop and market acid gas abatement systems, and has delivered 7,000 detoxifying cylinders and more than 1,000 storage units.
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