Metal Surface Treatment for Semiconductor Manufacturing Equipment

Clean-S Treatment

About the product

Resonac’s treatment uses the electroless plating method to deposit multilayer nickel (Ni) alloy film coatings on the metal surface of semiconductor manufacturing equipment.

​This surface treatment generates various properties that include corrosion resistance to corrosive gas atmospheres, wear resistance to sliding mechanical components, high mold releasability for rubber and other molds, and reduced mold contamination.​

  • * Image: inner cylinder after surface treatment
処理済のボンベの内面

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Merits

  • Plating multilayer film formation provides corrosion resistance superior to ordinary electroless Ni plates and protects the components from corrosion.
  • Features high abrasion and mold release properties.

Types of treatment

Type Features Specific applications

Clean-S Treatment Type A

 High hardness,
 wear resistance		 Dry pumps, injection molder screw parts, sliding parts, molds

Clean-S Treatment Type H

 Corrosion resistance to corrosive gases Molecular pumps, gas exhaust pipes, corrosion-resistant valves

Clean-S Treatment Type AF

 High corrosion resistance Chamber accessories, gas exhaust pipes, valves, parts for seawater and salt damage

Clean-S Treatment Type KF

 High corrosion resistance, abrasion resistance, low-temperature fluorination (F) treatment Chamber accessories, molds

 

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