High-Purity Sulfur Dioxide (SO2)
About the product
Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching organic films and chosen for etching carbon masks.
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Merits
- A stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
Appearance / colorless gas | Odor / pungent odor |
CAS NO / 7446-09-5 | UN number / 1079 |
High-pressure gas, liquefied gas | Toxic |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of SO2
Item | Data |
---|---|
Physical state | Gas |
Appearance | Liquefied gas |
Color | Colorless |
Odor | Pungent odor |
Odor threshold (ppm) | 0.3 – 3 ppm |
pH | Not applicable |
Melting point | -75.5℃ |
Boiling point | -10.0℃ |
Flash point | Not applicable (incombustible) |
Critical temperature | 51.49 ℃ |
Autoignition point | Not applicable (incombustible) |
Vapor pressure | 330 kPa (20℃) |
Relative density | Relative vapor density 2.2 (air = 1) |
Density | Gas 2.927 kg/m3 (0℃,101.3 kPa) Liquid 1.460 g/cm3 (-10℃) |
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