High-Purity Silicon Tetrafluoride (SiF4)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is chosen for various types of etching and forming SiOF or optical fibers.
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Benefits
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
| Appearance : colorless gas or liquid | Odor : pungent odor |
| CAS NO. : 7783-61-1 | UN number : 1859 |
| Incombustible, corrosive gas | Toxic |
- ※ Please refer to the Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of SiF4
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Colorless |
| Odor | Characteristic odor (pungent odor) |
| pH | Not applicable |
| Melting point | -95.7 °C |
| Boiling point | -65 °C (0.2 MPa) |
| Flash point | Not applicable |
| Critical temperature | -14.20 °C |
| Critical pressure | 3.72 MPa |
| Relative vapor density (20 °C) | 4.67 g/L (-1 °C) |
| Relative density | 3.57 (air = 1, 15 °C) |
| Density | 4.67 g/L (-1 °C) |
CLP Information
- Press. Gas (Comp.), H280
- Acute Tox. 2, H330
- Skin Corr. 1A, H314
- Eye Dam. 1, H318
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