High-Purity Sulfur Hexafluoride (SF6)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching polysilicon and chosen for forming TSVs (through-silicon vias).
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Merits
- Stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
| Appearance, odor / colorless odorless gas or liquid | UN number / 1080 |
| CAS NO / 2551-62-4 | Liquefied gas |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of SF6
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Colorless |
| Odor | Odorless |
| pH | Not applicable |
| Melting point | -50.8 ℃ (224kPa) |
| Boiling point | -63.7℃ (sublimation temperature: 1013 hPa) |
| Flash point | Incombustible |
| Critical temperature | 45.6 ℃ |
| Vapor pressure | 2.307MPa (21.1℃) |
| Critical pressure | 3.76MPa |
| Relative density | Liquid density: 1.880 kg/m3 (-50.8℃) Gaseous density: 6.16 kg/m3 (20℃,101.3 kPa) |
| Density | 5.1 (air = 1) |
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