High-Purity Hydrogen Bromide (HBr)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching polysilicon and chosen for selective etching of leading-edge logic semiconductors.
- ※ The sale and supply of products may not be available in certain countries or regions.
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Merits
- Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain from multiple production sites.
- Stable product quality with the technique for packaging corrosive gas.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
| Appearance / colorless gas | Odor / pungent odor |
| CAS NO / 10035-10-6 | UN number / 1048 |
| Liquefied gas | Deleterious substance |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical＆Chemical Properties of HBr
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Colorless |
| Odor | Pungent odor |
| pH | Not applicable |
| Melting point | -86.9℃ |
| Boiling point | -66.7℃ |
| Flash point | Incombustible |
| Critical temperature | 89.8℃ |
| Vapor pressure | 2.31 MPa (21.1℃) |
| Critical pressure | 8.51 MPa |
| Relative vapor density (20℃) | 3.33 kg/m3 |
| Relative density |
Gas’s specific gravity: 2.71 (air = 1) |
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