High-Purity Chlorine (Cl2)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching polysilicon.
- ※ The sale and supply of products may not be available in certain countries or regions.
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Merits
- Used for etching various types of polysilicon.
- Boasts one of the industry’s largest production volumes and a stable supplystructure supported by a strong supply chain from multiple production sites.
- Stable product quality with the technique for packaging corrosive gas.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
| Appearance / yellow-green gas or liquid | Odor / pungent odor |
| CAS NO / 7782-50-5 | UN number / 1017 |
| High-pressure gas, liquefied gas | Toxic |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of cl2
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Green ~ yellow |
| Odor | Strong pungent odor |
| pH | Not applicable |
| Melting point | -101℃ |
| Boiling point | -34.1℃ |
| Flash point | Not applicable |
| Autoignition point | Not applicable |
| Vapor pressure |
366 kPa（0℃） 669 kPa（20℃） |
| Relative vapor density (20℃) | 2.488(air = 1) |
| Relative density | 1.5577 (-34.05℃) |
| Explosive limits (upper, lower)(g/m³) | When mixing non-explosive chlorine with hydrogen gas, the explosive limit ranges from 5.5% - 89.0% (percentage of hydrogen gas content in chlorine gas). |
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