High-Purity Nitrous Oxide (N2O)

About the product

Resonac’s high-purity gas used for deposition of insulating films in semiconductor manufacturing, and particularly suitable for forming oxide films.

  • ※ The sale and supply of products may not be available in certain countries or regions.
亜酸化窒素（N2O）

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Benefits

  • Used to form various types of oxide films.
  • Proven sales track record with semiconductor makers.
  • High-quality technical support based on extensive marketing experience.
  • Available in a variety of packaging modes from 47 L cylinders to large containers (ISO tube containers).

Characteristics

Technical Data

Appearance : colorless gas or liquidUN number : 1070 (compressed gas),2201 (liquefied gas)
CAS NO. : 10024-97-2Sweet smell
  • ※ Please refer to the Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.

Physical & Chemical Properties of N2O

ItemData
Physical stateGas
AppearanceLiquefied gas
ColorColorless gas at room temperature
OdorOdorless or slightly sweet odor
pHNot applicable
Melting point-90.85 °C (87.8 kPa)
Boiling point-88.47 °C (101.3 kPa)
Flash pointEnhances the combustion of other substances
Vapor pressure87.8 kPa(-90.8 °C) 5.15 MPa(20 °C) 7.26 MPa(36.5 °C = critical temperature)
Relative vapor density (20 °C)1.53 (air = 1)
Relative density

Liquid density: 1.226 kg/L (boiling point) 

Gas density: 1.977 kg/m3 (0 °C, 101.3 kPa)

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