Anti-charging Material for Electron Beam Lithography
ESPACER
About the product
A material for forming a removable polymer conductive film on the surface of semiconductor wafers or glass.
The coating layer demonstrates high electronic conductivity.
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Merits
- Readily forms a thin conductive film with the use of a spin coater.
- Uses water as a solvent.
- Rising with water easily removes the generated conductive layer.
With the use of ESPACER (#100)
Without the use of ESPACER
Image photographs of the material’s anti-charging effect in electron beam lithography
Usage example
Anti-charging of electron beam lithography
Others
ESPACER may not deliver its maximum performance depending on the type of resist. For more details, please contact us.
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