High-Purity Solvent for Semiconductor Resists

Super SOLFINE Series

About the product

A high-quality solvent for advanced semiconductors and their materials (photoresists).
Resonac provides specification and quality that meet its customers’ requirements.

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Merits

  • A lineup of high-quality solvents whose high purity, low metal, particle or water content, etc. are guaranteed.
  • Solvents not in the list can also be provided with high purity in small amounts for laboratory use (test reagents) or pilot studies.
  • Metal impurities are controlled at a ppt (parts per trillion) level.
  • The solvent’s condition is guaranteed when filled in the designated packaging mode.

Product line-up

Product name Compound name CAS, product composition
Anone Cyclohexanone 108-94-1
γ-butyrolactone γ-butyrolactone 96-48-0
Ethyl lactate Ethyl lactate 687-47-8
NMP N-Methyl-2-pyrrolidone 872-50-4
PGEE Propylene glycol monoethyl ether 107-98-2
DPM Dipropylene glycol monomethyl ether 34590-94-8

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