High-Purity Silicon Tetrafluoride (SiF4)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is chosen for various types of etching and forming SiOF or optical fibers.
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Merits
- A stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
Appearance / colorless gas or liquid | Odor / pungent odor |
CAS NO / 7783-61-1 | UN number / 1859 |
Incombustible, corrosive gas | Toxic |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of SiF4
Item | Data |
---|---|
Physical state | Gas |
Appearance | Liquefied gas |
Color | Colorless |
Odor | Characteristic odor (pungent odor) |
pH | Not applicable |
Melting point | -95.7 ℃ |
Boiling point | -65℃ (0.2 MPa) |
Flash point | Not applicable |
Critical temperature | -14.20℃ |
Critical pressure | 3.72 MPa |
Relative vapor density (20℃) | 4.67 g/L (-1℃) |
Relative density | 3.57 (air = 1, 15℃) |
Density | 4.67 g/l (-1℃) |
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