High-Purity Boron Trichloride (BCl3)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching metals and chosen for gate etching of leading-edge logic semiconductors.
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Merits
- Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain.
- Stable product quality with the technique for packaging corrosive gas.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
Appearance, odor / colorless odorless gas or liquid | Liquefied gas |
CAS NO / 10294-34-5 | Toxic |
UN number / 1741 | - |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data
Physical&Chemical Properties of BCl3
Item | Data |
---|---|
Physical state | Gas |
Appearance | Liquefied gas |
Color | Clear and colorless |
Odor | Pungent odor |
pH | Not applicable |
Melting point | -107.3℃ |
Boiling point | 12.5℃ |
Flash point | Non-flammable |
Vapor pressure | 132 kPa (20℃) |
Relative density | 4.07 atmosphere (air = 1) |
Density |
Liquid (water = 1) 1.434 (0℃) |
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