High-Purity Chlorine (Cl2)​

About the product

Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching polysilicon.

塩素(Cl2)

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Merits

  • Used for etching various types of polysilicon.​
  • Boasts one of the industry’s largest production volumes and a stable supplystructure supported by a strong supply chain from multiple production sites.​
  • Stable product quality with the technique for packaging corrosive gas.​​
  • Proven sales track record with semiconductor makers.​
  • ​High-quality technical support based on extensive marketing experience.​

Characteristics​

Technical Data​

Appearance / yellow-green gas or liquid​ Odor / pungent odor​
CAS NO / 7782-50-5 UN number / 1017
High-pressure gas, liquefied gas​ Toxic​
  • Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data. ​

Physical & Chemical Properties of cl2

Item Data
Physical state Gas
Appearance Liquefied gas
Color Green ~ yellow
Odor Strong pungent odor
pH Not applicable
Melting point -101℃
Boiling point -34.1℃
Flash point Not applicable
Autoignition point Not applicable
Vapor pressure

366 kPa(0℃)

669 kPa(20℃)

Relative vapor density (20℃) 2.488  (air = 1)
Relative density 1.5577 (-34.05℃)
Explosive limits (upper, lower)(g/m³) When mixing non-explosive chlorine with hydrogen gas, the explosive limit ranges from 5.5% - 89.0% (percentage of hydrogen gas content in chlorine gas).​

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