High-Purity Sulfur Hexafluoride (SF6)

About the product

Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching polysilicon and chosen for forming TSVs (through-silicon vias).

六フッ化硫黄(SF6)

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Merits

  • stable supply structure supported by a strong supply chain.​
  • Proven sales track record with semiconductor makers.​
  • High-quality technical support based on extensive marketing experience.​

Characteristics

Technical Data

Appearance, odor / colorless odorless gas or liquid UN number / 1080
CAS NO / 2551-62-4 Liquefied gas
  • Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.

Physical & Chemical Properties of SF6

Item Data
Physical state Gas
Appearance Liquefied gas
Color Colorless
Odor Odorless
pH Not applicable
Melting point -50.8 ℃ (224kPa)
Boiling point -63.7℃ (sublimation temperature: 1013 hPa)
Flash point Incombustible
Critical temperature 45.6 ℃
Vapor pressure 2.307MPa (21.1℃)
Critical pressure 3.76MPa
Relative density Liquid density: 1.880 kg/m3 (-50.8℃)
Gaseous density: 6.16 kg/m3 (20℃,
101.3 kPa)
Density 5.1 (air = 1)

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