Clean Gas Hexafluoroethane
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Clean Gas FC-116 (Clean Gas Hexafluoroethane)
Technical Data
| Appearance: Colorless and odorless gas | UN Number: 2193 |
| CAS Number: 76-16-4 | Liquefied gas |
* Refer to MSDS for detailed information on the properties and safety of the product.
Specification
| Purity | vol% | Min. 99.999 |
|---|---|---|
| O2+Ar | volppm | Max. 2 |
| N2 | volppm | Max. 10 |
| CH4 | volppm | Max. 0.7 |
| CO | volppm | Max. 0.7 |
| CO2 | volppm | Max. 0.7 |
| H2O | volppm | Max. 3.0 |
| Acids as HF | volppm | Max. 0.1 |
| CF4 | volppm | Max. 2.0 |
| Other fluorocarbons | volppm | Max. 5.0 |
| Particle | Not smaller than 0.1 micrometer | Max. 60/C.F. |
Cylinder
* Estimated values for when a standard valve is mounted on a standard cylinder. The accuracy of these values is not guaranteed.
Valve
| Nozzle size | Ø22 mm X 14 right-hand threads |
|---|---|
| Material | SUS316L |
Physical & Chemical Properties
| Item | Unit | Data |
|---|---|---|
| Chemical formula | C2F6 | |
| Molecular weight | 138.01 | |
| Boiling point | °C | -78.15 |
| °F | -108.8 | |
| Melting point | °C | -101 |
| Specific gravity (air: 1) | 4.823 | |
| Liquid density (0°C, saturated liquid) | kg/L | 1.109 |
| Gas density | g/L | - |
| Critical temperature | °C | 19.65 |
| Critical pressure | MPa | 3.2 |
| kg/cm2 | 32.6 | |
| Flammability | Not applicable | |
| Toxicity | Not applicable | |
| Latent heat of vaporization (0°C, 1013MPa) | kJ/kg | 117.0 |
| Maximum permissible concentration (ACGIH) | ppm | - |
| Explosive limit (in air) | - |
Temperature - Vapor Pressure Curve
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